Two modulator generalized ellipsometer for complete mueller matrix measurement
Abstract
A twomodulator generalized ellipsometer (2MGE) comprising two polarizerphotoelastic modulator (PEM) pairs, an optical light source, an optical detection system, and associated data processing and control electronics, where the PEMs are freerunning. The input light passes through the first polarizerPEM pair, reflects off the sample surface or passes through the sample, passes through the second PEMpolarizer pair, and is detected. Each PEM is free running and operates at a different resonant frequency, e.g., 50 and 60 kHz. The resulting timedependent waveform of the light intensity is a complicated function of time, and depends upon the exact operating frequency and phase of each PEM, the sample, and the azimuthal angles of the polarizerPEM pairs, but can be resolved into a dc component and eight periodic components. In one embodiment, the waveform is analyzed using a new spectral analysis technique that is similar to Fourier analysis to determine eight sample Mueller matrix elements (normalized to the m.sub.00 Mueller matrix element). The other seven normalized elements of the general 4.times.4 Mueller matrix can be determined by changing the azimuthal angles of the PEMpolarizer pairs with respect to the plane of incidence. Since this instrument can measure all elements of the sample Mueller matrix, itmore »
 Inventors:

 (Oak Ridge, TN)
 Oak Ridge, TN
 Issue Date:
 Research Org.:
 Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
 OSTI Identifier:
 872530
 Patent Number(s):
 5956147
 Assignee:
 Lockheed Martin Energy Research Corporation ()
 Patent Classifications (CPCs):

G  PHYSICS G01  MEASURING G01J  MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT
G  PHYSICS G01  MEASURING G01N  INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
 DOE Contract Number:
 AC0596OR22464
 Resource Type:
 Patent
 Country of Publication:
 United States
 Language:
 English
 Subject:
 modulator; generalized; ellipsometer; complete; mueller; matrix; measurement; twomodulator; 2mge; comprising; polarizerphotoelastic; pem; pairs; optical; light; source; detection; associated; data; processing; control; electronics; pems; freerunning; input; passes; polarizerpem; pair; reflects; sample; surface; pempolarizer; detected; free; running; operates; resonant; frequency; 50; 60; khz; resulting; timedependent; waveform; intensity; complicated; function; time; depends; exact; operating; phase; azimuthal; angles; resolved; dc; component; eight; periodic; components; embodiment; analyzed; spectral; analysis; technique; similar; fourier; determine; elements; normalized; 00; element; seven; times; determined; changing; respect; plane; incidence; instrument; measure; powerful; standard; ellipsometers; mueller matrix; sample surface; optical detection; operating frequency; light passes; spectral analysis; input light; resonant frequency; data processing; light source; light intensity; optical light; analysis technique; generalized ellipsometer; modulator generalized; matrix elements; dc component; /356/
Citation Formats
Jellison, Jr., Gerald E., and Modine, Frank A. Two modulator generalized ellipsometer for complete mueller matrix measurement. United States: N. p., 1999.
Web.
Jellison, Jr., Gerald E., & Modine, Frank A. Two modulator generalized ellipsometer for complete mueller matrix measurement. United States.
Jellison, Jr., Gerald E., and Modine, Frank A. Fri .
"Two modulator generalized ellipsometer for complete mueller matrix measurement". United States. https://www.osti.gov/servlets/purl/872530.
@article{osti_872530,
title = {Two modulator generalized ellipsometer for complete mueller matrix measurement},
author = {Jellison, Jr., Gerald E. and Modine, Frank A},
abstractNote = {A twomodulator generalized ellipsometer (2MGE) comprising two polarizerphotoelastic modulator (PEM) pairs, an optical light source, an optical detection system, and associated data processing and control electronics, where the PEMs are freerunning. The input light passes through the first polarizerPEM pair, reflects off the sample surface or passes through the sample, passes through the second PEMpolarizer pair, and is detected. Each PEM is free running and operates at a different resonant frequency, e.g., 50 and 60 kHz. The resulting timedependent waveform of the light intensity is a complicated function of time, and depends upon the exact operating frequency and phase of each PEM, the sample, and the azimuthal angles of the polarizerPEM pairs, but can be resolved into a dc component and eight periodic components. In one embodiment, the waveform is analyzed using a new spectral analysis technique that is similar to Fourier analysis to determine eight sample Mueller matrix elements (normalized to the m.sub.00 Mueller matrix element). The other seven normalized elements of the general 4.times.4 Mueller matrix can be determined by changing the azimuthal angles of the PEMpolarizer pairs with respect to the plane of incidence. Since this instrument can measure all elements of the sample Mueller matrix, it is much more powerful than standard ellipsometers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}
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